Barrier Property
| Gas Permeability at 25°C | Moisture Vapor Transmission at 90%RH 37°C (g·mil/100In2·d)** | |||||||
| （cm3(STP)·mil）(100in2/d·atm)* | ||||||||
| H2 | O2 | CO2 | N2 | SO2 | H2S | Cl2 | ||
| Parylene N | 540 | 39 | 214 | 7.7 | 1890 | 795 | 74 | 1.5 |
| Parylene C | 110 | 7.2 | 7.7 | 1.0 | 11 | 13 | 0.35 | 0.21 |
| Parylene D | 240 | 32 | 13(a) | 4.5 | 4.75 | 1.45 | 0.55 | 0.25 |
| Parylene F | _ | _ | _ | _ | _ | _ | _ | _ |
| Parylene HT | _ | 59.69 | 242.32 | 12.19 | _ | _ | _ | 0.56 |
| Eposides（ER） | 110 | 5-10 | 8 | 4 | _ | _ | _ | 1.79-2.38(a) |
| Silicones（SR） | 45000 | 50000 | 300000 | _ | _ | _ | _ | 4.4-7.9(a) |
| Urethanes(UR) | _ | 200 | 3000 | 80 | _ | _ | _ | 2.4-8.7(a) |
(a）Iacari,J.J.and Brands,E.R.,Machine Design，May 25,1967，p.192
* ASTM D 1434
* * ASTM E 96
| parylene Thickness（um) | Initial Measurement | Precycle | Step 5 Cycle 3 | Step 5 Cycle 7 | Step 5 Cycle 10 | Step 7 Cycle 10 |
| 23℃50%RH | 23℃90%RH | 65℃90%RH | 65℃90%RH | 65℃90%RH | 25℃90%RH | |
| 50.8 | 2.0×1014 | 1.8×1013 | 2.3×1012 | 2.5×1011 | 1.4×1011 | 7.5×1012 |
| 38.1 | 5.0×1014 | 2.4×1013 | 8.6×1011 | 1.9×1011 | 1.1×1011 | 5.2×1012 |
| 25.4 | 2.0×1014 | 9.2×1012 | 8.1×1011 | 3.4×1011 | 1.3×1011 | 6.3×1012 |
| 12.7 | 5.0×1014 | 2.3×1013 | 4.1×1012 | 2.4×1011 | 1.1×1011 | 4.7×1012 |
| 7.6 | 5.0×1014 | 2.7×1013 | 4.4×1012 | 9.0×1010 | 4.7×1010 | 2.9×1012 |
| 2.5 | 5.0×1014 | 3.2×1010 | 1.3×1011 | 1.1×1011 | 6.4×1010 | 2.3×1012 |
