0.5-1.5mil film thickness changes after 90 minutes immersed in kinds of solvent at room temperature(measured by infrared method)
| solvent | Parylene Thickness Variations（%） |
| Parylene N | Parylene C | Parylene D |
| Isopropyl alcohol | 0.3 | 0.1 | 0.1 |
| Isooctane | 0.2 | 0.4 | 0.3 |
| pyridine | 0.2 | 0.5 | 0.5 |
| Mixed xylene | 1.4 | 2.3 | 1.1 |
| Trichloroethylene（TCE） | 0.5 | 0.8 | 0.8 |
| Chlorobenzene | 1.1 | 1.5 | 1.5 |
| Dichlorobenzene | 0.2 | 3 | 1.8 |
| Trichlorodifluoroethane | 0.2 | 0.2 | 0.2 |
| Acetone | 0.3 | 0.9 | 0.4 |
| A ketone of glutaric | 0.6 | 1.2 | 1.4 |
| Deionized water | 0 | 0 | 0 |
0.5-1.5mil film thickness changes after 90 minutes immersed in kinds of reagent at room temperature(measured by infrared method)
| Reagent | Concentration | Parylene Thickness Variations（%） |
| Parylene N | Parylene C | Parylene D |
| Hydrochloric acid | 10% | 0 | 0 | 0.1 |
| Concentrated hydrochloric acid | 37% | 0.2 | 0 | 0.5 |
| Sulfuric acid | 10% | 0.1 | 0.3 | 0.2 |
| Concentrated sulfuric acid | 95-98% | 0.2 | 0.4 | 0.8 |
| Nitric acid | 10% | 0.1 | 0.1 | 0.2 |
| Concentrated nitric acid | 71% | 0.2 | 0.2 | 0.5 |
| Chromic acid | 10% | 0.1 | 0.1 | 0.1 |
| Concentrated chromic acid | 74% | 0.3 | 0 | 0.2 |
| Strong base (sodium hydroxide) | 10% | 0.1 | 0 | 0.1 |
| Weak base (ammonium hydroxide) | 10% | 0.3 | 0.2 | 0.1 |
